Pressure Sensors

Protron has developed an absolute pressure sensor system which is based on an ultra small surface micromachined capacitive sensor element. The special choice of fused silica as a nonconducting substrate material results in the elimination of all parasitic capacitances to the substrate. Due to the capacitive principle the sensor has a long term high accuracy and a very small hysteresis compared to piezoresistive pressure sensors. The sensor die and a 14bit analog-to-digital converter are packaged in a 5x5mm² LCC-housing. The device is controlled via I²C-lines. A simple external circuit allows reprogramming and recalibration.